EquipmentHeidelberg uPG101 Mask Writer
Nano Lab
Description
The Heidelberg Instruments μPG 101 laser writer is a versatile micro pattern generation tool for direct writing/maskless lithography and low volume mask making of up to 5" chrome-glass photolithography masks.
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DEPARTMENT
- Electrical and Computer Engineering
BUILDING
- Engineering - Link
AVAILABILITY
- Available for internal & external use
Location
Nano Lab