EquipmentProfilm3D Optical Profilometer

The Profilm3D® optical profiler uses state-of-the-art white light interferometry (WLI) to measure surface profiles and roughness down to 0.05 µm; adding the low-cost PSI option takes the minimum vertical feature size down to 0.001 µm. The newest generation of the Profilm3D optical profilometer offers Enhanced Roughness Mode for accurately imaging rough surfaces and highly-sloped sidewalls.

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