EquipmentTergeo Automatic Tabletop Plasma Cleaner

Nano Lab

Description

Automatic tabletop plasma cleaner for research laboratories and low volume production with oxygen and air gas sources. Equipped with immersion plasma cleaning for high speed etching and surface modification and remote plasma for gentle surface contamination removal.

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DEPARTMENT

  • Electrical and Computer Engineering

BUILDING

  • Engineering - Link

AVAILABILITY

  • Available for internal & external use

Location

Nano Lab