EquipmentHeadway PWM32-PS-R790 spin coater
Nano Lab
Description
Built-in photoresist spin-coater in Yellow Room environment, up to 10,000 rpm for relatively light loads such as silicon wafers, small photomasks, etc. and substrates up to 5-inch maximum.
MORESEE MORE (opens in a new tab)Contacts
DEPARTMENT
- Electrical and Computer Engineering
BUILDING
- Engineering - Link
AVAILABILITY
- Available for internal & external use
Location
Nano Lab